| Academic Year |
2025Year |
School/Graduate School |
Graduate School of Advanced Science and Engineering (Master's Course) Division of Advanced Science and Engineering Quantum Matter Program |
| Lecture Code |
WSP05800 |
Subject Classification |
Specialized Education |
| Subject Name |
Technology Analytics on Advanced LSIs |
Subject Name
（Katakana） |
|
Subject Name in
English |
Technology Analytics on Advanced LSIs |
| Instructor |
WAKABAYASHI HITOSHI |
Instructor
(Katakana) |
ワカバヤシ ヒトシ |
| Campus |
Across Campuses (videoconferencing, etc.) |
Semester/Term |
1st-Year, First Semester, 2Term |
| Days, Periods, and Classrooms |
(2T) Inte |
| Lesson Style |
Lecture |
Lesson Style
(More Details) |
Online (simultaneous interactive) |
| |
| Credits |
2.0 |
Class Hours/Week |
|
Language of Instruction |
E
:
English |
| Course Level |
6
:
Graduate Advanced
|
| Course Area（Area） |
25
:
Science and Technology |
| Course Area（Discipline） |
12
:
Electronics |
| Eligible Students |
|
| Keywords |
Large-scale integrated circuit (VLSI) technology, CMOS integrated circuit, scaling technology, miniaturization technology, exposure technology, film formation technology, etching technology, CMP technology, memory device technology, sensor technology, actuator technology, wiring technology, passive device technology, packaging technology |
| Special Subject for Teacher Education |
|
Special Subject |
|
Class Status
within Educational
Program
(Applicable only to targeted subjects for undergraduate students) | |
|---|
Criterion referenced
Evaluation
(Applicable only to targeted subjects for undergraduate students) | |
|---|
Class Objectives
/Class Outline |
It is very important to understand the large-scale integrated circuit (VLSI) technology to support the modern society in the underlying. Especially, a comprehensive understanding of manufacturing technology is going to be discussed mainly using cross-sectional transmission electron micrographs of LSIs. |
| Class Schedule |
Day1 pm Class 1 Introduction: LSIs and Analysis methods Class 2 Logic LSI: Lecture and preparation of presentation
Day 2 Class 3 Logic LSI: Presentations and discussions Class 4 Memory: Lecture and preparation of presentation
Day 3 Class 5 Memory: Presentations and discussions Class 6 Sensor: Lecture and preparation of presentation
Day 4 am Class 7 Sensor: Presentations and discussions Class 8 Conclusions |
Text/Reference
Books,etc. |
Textbook(s)
Fundamentals of Modern VLSI Devices, 2nd Edition, Yuan Taur and Tak H. Ning, Cambridge University Press
Semiconductor Manufacturing Technology, Michael Quirk and Julian Serda, Prentice Hall
Nanoelectronics and Information Technology, Rainer Waser, Wilery-VCH |
PC or AV used in
Class,etc. |
|
| (More Details) |
|
| Learning techniques to be incorporated |
|
Suggestions on
Preparation and
Review |
None |
| Requirements |
This course is part of the Integrated Green-niX College program (a joint program with Institute of Science Tokyo, Toyohashi University of Technology, Nagaoka University of Technology and Meiji University, based on a memorandum of understanding for credit transfer related to semiconductor talent development). Please note that you cannot register for this course unless you have completed the special audit student application procedure at your respective university beforehand. |
| Grading Method |
No Examination. Evaluation will be based on the content of the presentation and the report given in the final class. |
| Practical Experience |
|
| Summary of Practical Experience and Class Contents based on it |
|
| Message |
|
| Other |
|
Please fill in the class improvement questionnaire which is carried out on all classes.
Instructors will reflect on your feedback and utilize the information for improving their teaching. |