WSP04900 Introduction Semiconductor Memory Technology

Hiroshima University Syllabus

Japanese

Academic Year 2024Year School/Graduate School Graduate School of Advanced Science and Engineering (Master's Course) Division of Advanced Science and Engineering Quantum Matter Program

Lecture Code WSP04900 Subject Classification Specialized Education

Subject Name 半導体メモリ技術概論

Subject Name
（Katakana）ハンドウタイメモリギジュツガイロン

Subject Name in
English Introduction Semiconductor Memory Technology

Instructor TERAMOTO AKINOBU,UCHIDA KATSUNORI,IZAWA MASARU,ITO HIROYUKI,OBA TOMIHITO,MATSUNAGA NORIAKI,GOTO TETSUYA,MACHIDA TAKAHIRO,UCHIYAMA SHIRO,NARIYOSHI YASUHIRO,MATSUHASHI HIDEKI,YOSHIDA KAZUYOSHI,GODA AKIRA,TAGUWA TETSUYA,TANAKA TOMOHARU,MIYASHITA TOSHIHIKO,AOTO NAHOMI

Instructor
(Katakana) テラモト　アキノブ,ウチダ　カツノリ,イザワ　マサル,イトウ　ヒロユキ,オオバ　トミヒト,マツナガ　ノリアキ,ゴトウ　テツヤ,マチダ　タカヒロ,ウチヤマ　シロウ,ナリヨシ　ヤスヒロ,マツハシ　ヒデキ,ヨシダ　カズヨシ,ゴウダ　アキラ,タグワ　テツヤ,タナカ　トモハル,ミヤシタ　トシヒコ,アオト　ナホミ

Campus Higashi-Hiroshima Semester/Term 1st-Year,  Second Semester,  4Term

Days, Periods, and Classrooms (4T) Thur5-8：AdSM 401N

Lesson Style Lecture Lesson Style
(More Details) 　

Credits 2.0 Class Hours/Week 　 Language of Instruction B : Japanese／English

Course Level 6 : Graduate Advanced

Course Area（Area） 25 : Science and Technology

Course Area（Discipline） 12 : Electronics

Eligible Students

Keywords

Special Subject for Teacher Education 　 Special Subject 　

Class Status
within Educational
Program
(Applicable only to targeted subjects for undergraduate students)
Criterion referenced
Evaluation
(Applicable only to targeted subjects for undergraduate students)

Class Objectives
/Class Outline The lecture will cover semiconductor memory, especially DRAM and flash memory, including the transition of their structures.  The lecture will be followed by explanations of the principles and specific methods of manufacturing processes, as well as a tour of a factory to promote a deeper understanding of advanced semiconductor manufacturing. The lectures will be given in an omnibus format by experts from industry.

Class Schedule lesson1　Introduction (Prof. Teramoto and Prof. Aoto, Hiroshima University)
lesson2 Introduction to Semiconductor Memory (Visiting Prof. Takuwa, Micron Memory Japan)
lesson3 Circuit Design of DRAM (Visiting Prof. Uchida, Micron Memory Japan)
lesson4 DRAM Device Technology, Chip Stack Technology (Visiting Prof. Miyashita, Visiting Prof. Uchiyama, Micron Memory Japan)
lesson5 Flash Memory Technology (Visiting Prof. Goda, Visiting Prof. Tanaka, Micron Memory Japan)
lesson6 Advanced DRAM Manufacturing Technology and Engineering
lesson7 Smart Manufacturing of Semiconductor Memory Utilizing Big Data (Visiting Prof. Matsuhashi, Micron Memory Japan)
lesson8 Overview of Semiconductor Memory Process Technology (Micron Memory Japan, Visiting Professor Yoshida)
lesson9 Semiconductor Wafer Cleaning Technology (SCREEN, Visiting Professor Tanaka)
lesson10 Lithography Technology (ASML Japan, Visiting Professor Machida)
lesson11 Plasma for Semiconductor Processing (Tokyo Electron, Visiting Professor Goto)
lesson12 Etching Technology (Hitachi High-Tech, Visiting Professor Izawa)
lesson13 Ion Implantation/Interconnect Formation Technology (Applied Materials Japan, Visiting Professor Ito, Visiting Professor Matsunaga)
lesson14 Process Informatics (Prof. Oba, Lam Research)
lesson15 Micron Memory Japan Higashi-Hiroshima Plant Tour (Prof. Nariyoshi, Micron Memory Japan, Prof. Teramoto, Hiroshima University)

Students will submit reports each time.

Text/Reference
Books,etc. H. Sugai, Plasma Electronics, Ohmsha (in Japanese), H. Kakunan, Semiconductor Memory, Corona (in Japanese), C. Y. Chang & S. M. Sze, ULSI Technology, McGraw-Hill.

Materials will be handed out at each session.

PC or AV used in
Class,etc. 　

(More Details)

Learning techniques to be incorporated 　

Suggestions on
Preparation and
Review Many of the terms will be new to you. If you have any questions, please ask questions and review the handouts.

Requirements

Grading Method A report to be submitted after each meeting will be graded (out of 100 points) and the grade will be based on the average score.

Practical Experience

Summary of Practical Experience and Class Contents based on it

Message This is an omnibus lecture series given by experienced professors from companies involved in semiconductor device manufacturing. The course is designed to provide an understanding of the fundamentals and recent trends in semiconductor manufacturing.

Other

Please fill in the class improvement questionnaire which is carried out on all classes.
Instructors will reflect on your feedback and utilize the information for improving their teaching.

Academic Year	2024Year	School/Graduate School	Graduate School of Advanced Science and Engineering (Master's Course) Division of Advanced Science and Engineering Quantum Matter Program
Lecture Code	WSP04900	Subject Classification	Specialized Education
Subject Name	半導体メモリ技術概論
Subject Name （Katakana）	ハンドウタイメモリギジュツガイロン
Subject Name in English	Introduction Semiconductor Memory Technology
Instructor	TERAMOTO AKINOBU,UCHIDA KATSUNORI,IZAWA MASARU,ITO HIROYUKI,OBA TOMIHITO,MATSUNAGA NORIAKI,GOTO TETSUYA,MACHIDA TAKAHIRO,UCHIYAMA SHIRO,NARIYOSHI YASUHIRO,MATSUHASHI HIDEKI,YOSHIDA KAZUYOSHI,GODA AKIRA,TAGUWA TETSUYA,TANAKA TOMOHARU,MIYASHITA TOSHIHIKO,AOTO NAHOMI
Instructor (Katakana)	テラモト　アキノブ,ウチダ　カツノリ,イザワ　マサル,イトウ　ヒロユキ,オオバ　トミヒト,マツナガ　ノリアキ,ゴトウ　テツヤ,マチダ　タカヒロ,ウチヤマ　シロウ,ナリヨシ　ヤスヒロ,マツハシ　ヒデキ,ヨシダ　カズヨシ,ゴウダ　アキラ,タグワ　テツヤ,タナカ　トモハル,ミヤシタ　トシヒコ,アオト　ナホミ
Campus	Higashi-Hiroshima	Semester/Term	1st-Year, Second Semester, 4Term
Days, Periods, and Classrooms	(4T) Thur5-8：AdSM 401N
Lesson Style	Lecture	Lesson Style (More Details)

Credits	2.0	Class Hours/Week		Language of Instruction	B : Japanese／English
Course Level	6 : Graduate Advanced
Course Area（Area）	25 : Science and Technology
Course Area（Discipline）	12 : Electronics
Eligible Students
Keywords
Special Subject for Teacher Education		Special Subject
Class Status within Educational Program (Applicable only to targeted subjects for undergraduate students)
Criterion referenced Evaluation (Applicable only to targeted subjects for undergraduate students)
Class Objectives /Class Outline	The lecture will cover semiconductor memory, especially DRAM and flash memory, including the transition of their structures. The lecture will be followed by explanations of the principles and specific methods of manufacturing processes, as well as a tour of a factory to promote a deeper understanding of advanced semiconductor manufacturing. The lectures will be given in an omnibus format by experts from industry.
Class Schedule	lesson1　Introduction (Prof. Teramoto and Prof. Aoto, Hiroshima University) lesson2 Introduction to Semiconductor Memory (Visiting Prof. Takuwa, Micron Memory Japan) lesson3 Circuit Design of DRAM (Visiting Prof. Uchida, Micron Memory Japan) lesson4 DRAM Device Technology, Chip Stack Technology (Visiting Prof. Miyashita, Visiting Prof. Uchiyama, Micron Memory Japan) lesson5 Flash Memory Technology (Visiting Prof. Goda, Visiting Prof. Tanaka, Micron Memory Japan) lesson6 Advanced DRAM Manufacturing Technology and Engineering lesson7 Smart Manufacturing of Semiconductor Memory Utilizing Big Data (Visiting Prof. Matsuhashi, Micron Memory Japan) lesson8 Overview of Semiconductor Memory Process Technology (Micron Memory Japan, Visiting Professor Yoshida) lesson9 Semiconductor Wafer Cleaning Technology (SCREEN, Visiting Professor Tanaka) lesson10 Lithography Technology (ASML Japan, Visiting Professor Machida) lesson11 Plasma for Semiconductor Processing (Tokyo Electron, Visiting Professor Goto) lesson12 Etching Technology (Hitachi High-Tech, Visiting Professor Izawa) lesson13 Ion Implantation/Interconnect Formation Technology (Applied Materials Japan, Visiting Professor Ito, Visiting Professor Matsunaga) lesson14 Process Informatics (Prof. Oba, Lam Research) lesson15 Micron Memory Japan Higashi-Hiroshima Plant Tour (Prof. Nariyoshi, Micron Memory Japan, Prof. Teramoto, Hiroshima University) Students will submit reports each time.
Text/Reference Books,etc.	H. Sugai, Plasma Electronics, Ohmsha (in Japanese), H. Kakunan, Semiconductor Memory, Corona (in Japanese), C. Y. Chang & S. M. Sze, ULSI Technology, McGraw-Hill. Materials will be handed out at each session.
PC or AV used in Class,etc.
(More Details)
Learning techniques to be incorporated
Suggestions on Preparation and Review	Many of the terms will be new to you. If you have any questions, please ask questions and review the handouts.
Requirements
Grading Method	A report to be submitted after each meeting will be graded (out of 100 points) and the grade will be based on the average score.
Practical Experience
Summary of Practical Experience and Class Contents based on it
Message	This is an omnibus lecture series given by experienced professors from companies involved in semiconductor device manufacturing. The course is designed to provide an understanding of the fundamentals and recent trends in semiconductor manufacturing.
Other
Please fill in the class improvement questionnaire which is carried out on all classes. Instructors will reflect on your feedback and utilize the information for improving their teaching.

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