| Academic Year |
2025Year |
School/Graduate School |
Graduate School of Advanced Science and Engineering (Master's Course) Division of Advanced Science and Engineering Quantum Matter Program |
| Lecture Code |
WSP05100 |
Subject Classification |
Specialized Education |
| Subject Name |
集積電子システム論II |
Subject Name
（Katakana） |
シュウセキデンシシステムロンニ |
Subject Name in
English |
LSI systemsII |
| Instructor |
TAKAHASHI KAZUHIRO,NODA TOSHIHIKO |
Instructor
(Katakana) |
タカハシ カズヒロ,ノダ トシヒコ |
| Campus |
Across Campuses (videoconferencing, etc.) |
Semester/Term |
1st-Year, First Semester, 2Term |
| Days, Periods, and Classrooms |
(2T) Mon9-10 |
| Lesson Style |
Lecture |
Lesson Style
(More Details) |
Online (simultaneous interactive), Online (on-demand) |
| |
| Credits |
1.0 |
Class Hours/Week |
2 |
Language of Instruction |
J
:
Japanese |
| Course Level |
6
:
Graduate Advanced
|
| Course Area（Area） |
25
:
Science and Technology |
| Course Area（Discipline） |
12
:
Electronics |
| Eligible Students |
博士課程前期学生 |
| Keywords |
CMOS, MEMS, Semiconductor, Sensor, Actuator, Integrated Circuit |
| Special Subject for Teacher Education |
|
Special Subject |
|
Class Status
within Educational
Program
(Applicable only to targeted subjects for undergraduate students) | |
|---|
Criterion referenced
Evaluation
(Applicable only to targeted subjects for undergraduate students) | |
|---|
Class Objectives
/Class Outline |
To learn basic knowledge of microfabrication, evaluation, and packaging technologies required for device fabrication using
CMOS/MEMS integrated sensors.
To systematically learn and understand each element of CMOS/MEMS technology and be able to design fabrication
processes that integrate them. |
| Class Schedule |
1. (Takahashi) Introduction & Application of MEMS device
2. (Takahashi) Design of micro actuator 1- material mechanics
3. (Takahashi) Design of micro actuator 2- calculation of electrostatic force
4. (Takahashi) Design of micro actuator 3- electrostatic comb-drive actuator
5. (Takahashi) MEMS process overview
6. (Takahashi) Sacrificial etching technique, bonding technique
7. (Takahashi) Integrated MEMS sensor
8. (Takahashi) Summary of MEMS devices & Final examination |
Text/Reference
Books,etc. |
No textbook |
PC or AV used in
Class,etc. |
|
| (More Details) |
|
| Learning techniques to be incorporated |
|
Suggestions on
Preparation and
Review |
To enhance a learning effect, students are encouraged to refer to reference books to prepare for and review the lecture for around 90 minutes each. |
| Requirements |
This course is part of the Integrated Green-niX College program (a joint program with Institute of Science Tokyo, Toyohashi University of Technology, Nagaoka University of Technology and Meiji University, based on a memorandum of understanding for credit transfer related to semiconductor talent development). Please note that you cannot register for this course unless you have completed the special audit student application procedure at your respective university beforehand. |
| Grading Method |
Final grade will be evaluated by examinations(50%) and reports(50%).
Students who attend all classes will be evaluated as follows:
S: Achieved all goals and obtained total points of examinations and reports, 90 or higher (out of 100 points).
A: Achieved 80 % of goals and obtained total points of examinations and reports, 80 or higher (out of 100 points).
B: Achieved 70 % of goals and obtained total points of examinations and reports, 70 or higher (out of 100 points).
C: Achieved 60 % of goals and obtained total points of examinations and reports, 60 or higher (out of 100 points). |
| Practical Experience |
|
| Summary of Practical Experience and Class Contents based on it |
|
| Message |
|
| Other |
|
Please fill in the class improvement questionnaire which is carried out on all classes.
Instructors will reflect on your feedback and utilize the information for improving their teaching. |